Model IMFS

Instrument Applications:
- Mass Extraction at vacuum under 0.2 psia (hard vacuum)
- Leak Detection of 0.1 to 0.2 micron defects
- Air measurements from 5 x 7-7 sccs
- Intelligent Molecular Flow Sensor - operates mostly in transitional and molecular flow regimes
- Outgassing / Premeability application
- Calibration of leak devices
Features:
- Intelligent Molecular Flow Sensor - Operates mostly in transitional and molecular flow regimes
- Measures mass flow, using ATC's patented ALF design
- Measures hard vacuum to 15 psia
- Rugged, stainless steel construction
- No moving parts
The IGLS is a part of ATC's complete leak test instruments, portable unit, or part of a larger automated test system. The micro-flow sensor is not available by itself.
Flow Range:

- 0-1 micrograms/min
- 0-2.5 micrograms/min
- 0-5 micrograms/min
- 0-10 micrograms/min
- 0-100 micrograms/min
- 0-400 micrograms/min
Measurement Uncertainty: ±5% (2% optional) of reading, calibrated range.
Pressure Range:
- 0-0.2 or 0-15 (psi-absolute)
- Type: Absolute, capacitance
- Measurement Uncertainty: 0.25% of Full Scale (FS)
Temperature Range:
- Operating and Calibrated: 10 to 45°C
- Storage: -25 to 50°C
- Sensor Type: RTD 100 Ohms
- Measurement uncertainty at calibrated range: 0.5°C
Resolution: 16 bits A/D and 16 bits D/A
Interface:
- Serial port
- Digital I/O: Start/Stop, type clamp and more…
- Analog I/O
- Power: 115 or 220 VAC, single phase
- Optional: 2-line character display
Max. Differential Pressure: 0.02 psid
Gases Used:
- Use dry non-condensing and clean gases
- Air, Nitrogen, Helium, Argon, & Carbon Dioxide
- Other Gases Available, consult ATC, Inc.
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ATC, Inc.'s Intelligent Gas Leak Sensor (IGLS), Intelligent Gas Flow Sensor/Standard (IGFS), Intelligent Molecular Flow Sensor (IMFS), Mass Extraction Technology and Leak-Tek© Program are proprietary products belonging to Advanced Test Concepts (ATC), Inc. and are protected by existing patents (5,861,546; 6,308,556B1; 6,584,828B2; 6,854,318B2; EP1356260) as well as other US and International patents pending.
Adaptive Test Feature and Set Up Tools are proprietary products belonging to ATC, Inc. and are protected by existing patent (7,231,811B2). The Leak-Tek© Program, Gas-Cal© Program, and Flo-Cal© Program are protected by international copyright laws.


