Model IL2-M

Instrument Applications:
- 2 psia to 24.5 psia (mild vacuum to low pressure)
- Leak Rates: 1 x 10 -5 sccs at 2 psia
- Used for Mass Extraction applications
- Can be used for applications with low positive pressure and tight leak specification
- Detection of 2 micron defects of larger
Features:
- Micro-Flow Sensor - The Intelligent Gas Leak Sensor (IGLS)
- Measures volume flow - using ATC's patented ALF design
- Measures absolute downstream pressure and temperature
- Stainless steel rugged construction
- No moving parts
- No over-flow sensitivity
- Measurement units select by user, typically mm3/min (µL/min)
- Lowest capable measurement, 1x10-6 sccs at 2 psia
Flow Range:

- 0-25 mm3 /min (micro liters/min)
- 0-50 mm3 /min (micro liters/min)
- 0-100 mm3 /min (micro liters/min)
- 0-250 mm3 /min (micro liters/min)
- 0-500 mm3 /min (micro liters/min)
- 0-990 mm3 /min (micro liters/min)
Sensor Type: Accelerated Laminar Flow (ALF).
Measurement Uncertainty: ±2% of reading (1% optional), calibrated range.
Pressure Range:
- 0-15; 30; (psi-absolute)
- Type: Absolute, silicon micro-machined
- Measurement Uncertainty: 0.2% of Full Scale (FS)
- Maximum over Pressure: 1.2 times full range/scale
Temperature Range:
- Operating and Calibrated: 10 to 45°C
- Storage: -25 to 50°C
- Sensor Type: RTD 100 Ohms
- Measurement uncertainty at calibrated range: 0.5°C
Resolution: 16 bits A/D and 16 bits D/A
Interface:
- Serial port
- Digital I/O: Start/Stop, type clamp and more…
- Analog I/O
- Power: 115 or 220 VAC, single phase
- Optional: 2-line character display
Max. Differential Pressure: 10 psi, differential
Gases Used:
- Use dry non-condensing and clean gases
- Air, Nitrogen, Helium, Argon, & Carbon Dioxide
- Other Gases Available, consult ATC, Inc.
Response Time:
- Step function: from no flow to full range - 50 ms or less
- Sensor only, no volume
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