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Sensor IMFS

The IGLS is a part of ATC’s complete leak test instruments, portable unit, or part of a larger automated test system. The micro-flow sensor is not available by itself. The IGLS is included with Models ME2 and ME3.

Product Usage

  • Mass Extraction at vacuum under 0.2 psia (hard vacuum)
  • Leak Detection as low as 0.1 to 0.2 micron defects
  • Air measurements from 5 x 7-7 sccs
  • Intelligent Molecular Flow Sensor – operates mostly in transitional and molecular flow regimes
  • Outgassing / Permeability applications
  • Calibration of leak devices

Flow Range:

  • 0-1 micrograms/min
  • 0-2.5 micrograms/min
  • 0-5 micrograms/min
  • 0-10 micrograms/min
  • 0-100 micrograms/min
  • 0-400 micrograms/min

Interface:

  • Serial port
  • Digital I/O: Start/Stop, type clamp and more…
  • Analog I/O
  • Power: 115 or 220 VAC, single phase
  • Optional: 2-line character display

Pressure Range:

  • 0-0.2 or 0-15 (psi-absolute)
  • Type: Absolute, capacitance

Temperature Range:

  • Operating and Calibrated: 10 to 45°C
  • Storage: -25 to 50°C
  • Sensor Type: RTD 100 Ohms

Features

  • Intelligent Molecular Flow Sensor – Operates mostly in transitional and molecular flow regimes
  • Measures mass flow, using ATC’s patented ALF design
  • Measures hard vacuum to 15 psia
  • Rugged, stainless steel construction
  • No moving parts
  • Optional dual range calibration

Measurement Uncertainty:

  • Flow: ±5% (2% optional) of reading, calibrated range.
  • Pressure: 0.25% of Full Scale (FS)
  • Temperature uncertainty at calibrated range: 0.5°C

Resolution:

16 bits A/D and 16 bits D/A

Max. Differential Pressure:

0.02 psid

Gases Used:

  • Use dry non-condensing and clean gases
  • Air, Nitrogen, Helium, Argon, & Carbon Dioxide
  • Other Gases Available, consult ATC
All products ship fully calibrated. No daily calibration required.