Home > Micro-Flow Sensors > Sensor IL2-M / IL2-KM

Sensor IL2-M / IL2-KM

The IL2-M and IL2-KM sensors are designed for use with the following products: E-PDQ, E2, VE2, IPE, IPE2, ME2, ME3.

Product Usage

  • 2 psia to 65 psia (mild vacuum to mid-range pressure)
  • Leak Rates: From 1 x 10 -5 sccs at 2 psia
  • Used for Mass Extraction applications
  • Can be used for applications with low positive pressure and tight leak specification
  • Detection of 2 micron defects or larger

IL2-M Flow Range:

  • 0-25 mm3 /min (micro liters/min)
  • 0-50 mm3 /min (micro liters/min)
  • 0-100 mm3 /min (micro liters/min)
  • 0-250 mm3 /min (micro liters/min)
  • 0-500 mm3 /min (micro liters/min)
  • 0-990 mm3 /min (micro liters/min)
  • 0-3000 mm3 /min (micro liters/min)
  • 0-5000 mm3 /min (micro liters/min)

IL2-KM Flow Range:

  • 0-10 cc/min
  • 0-25 cc/min
  • 0-50 cc/min
  • 0-100 cc/min
  • 0-250 cc/min

Interface:

  • Serial port
  • Digital I/O: Start/Stop, type clamp and more…
  • Analog I/O
  • Power: 115 or 220 VAC, single phase
  • Optional: 2-line character display

Pressure Range:

  • 0-15; 30; 65 (psi-absolute)
  • Type: Absolute, silicon micro-machined
  • Maximum over Pressure: 1.2 times full range/scale

Temperature Range:

  • Operating and Calibrated: 10 to 45°C
  • Storage: -25 to 50°C
  • Sensor Type: RTD 100 Ohms

Features

  • Micro-Flow Sensor – The Intelligent Gas Leak Sensor (IGLS)
  • Measures volume flow – using ATC’s patented ALF design
  • Measures absolute downstream pressure and temperature
  • Stainless steel rugged construction
  • No moving parts
  • No over-flow sensitivity
  • Measurement units select by user, typically mm3/min (µL/min)
  • Optional dual range calibration

Resolution:

16 bits A/D and 16 bits D/A

Sensor Type:

Accelerated Laminar Flow (ALF).

Measurement Uncertainty:

  • Flow: ±2% of reading (1% optional), calibrated range.
  • Pressure: 0.2% of Full Scale (FS)
  • Temperature uncertainty at calibrated range: 0.5°C

Gases Used:

  • Use dry non-condensing and clean gases
  • Air, Nitrogen, Helium, Argon, & Carbon Dioxide
  • Other Gases Available, consult ATC

Response Time:

  • Step function: from no flow to full range – 50 ms or less
  • Sensor only, no volume
All products ship fully calibrated. No daily calibration required.