Sensor IF2-M

The IF2-M gas flow sensor is designed for Applicable Air Flow Range of 0-25(min) to 0-5000(max) microliters/min (µL/min).

Product Usage

  • Micro-Flow measurement ranges
  • Portable transfer flow standard
  • Calibration of leak test orifices and instruments
  • Gauging of micron sized holes
  • Pressure/Vacuum range of 2-25 psia

Flow Range:

  • 0-25 mm3 /min (micro liters/min)
  • 0-50 mm3 /min (micro liters/min)
  • 0-100 mm3 /min (micro liters/min)
  • 0-250 mm3 /min (micro liters/min)
  • 0-500 mm3 /min (micro liters/min)
  • 0-990 mm3 /min (micro liters/min)
  • 0-3000 mm3 /min (micro liters/min)
  • 0-5000 mm3 /min (micro liters/min)

Pressure Range:

  • 0-15; 30; (psi-absolute)
  • Type: Absolute, silicon micro-machined
  • Maximum over Pressure: 1.2 times full range/scale

Temperature Range:

  • Operating and Calibrated: 10 to 45°C
  • Storage: -25 to 50°C
  • Sensor Type: RTD 100 Ohms

Resolution:

16 bits A/D and 16 bits D/A

Interface:

  • Serial port
  • Digital I/O: Start/Stop, type clamp and more…
  • Analog I/O
  • Power: 115 or 220 VAC, single phase
  • Optional: 2-line character display

Features

  • Micro-Flow Sensor – The Intelligent Gas Flow Sensor (IGFS)
  • Measures volume flow – using ATC’s patented ALF design
  • Dual range calibration, automatic range switch
  • Measures absolute downstream pressure and temperature
  • Optional: Automatic compensation for gas properties, temperature and viscosity
  • Stainless steel rugged construction
  • No moving parts
  • No over-flow sensitivity
  • Measurement units select by user, typically mm3/min (µL/min)
  • Lowest capable measurement, 1×10-6 sccs at 2 psia

Sensor Type:

Accelerated Laminar Flow (ALF).

Measurement Uncertainty:

  • Flow: ±2% of reading (1% optional), calibrated range.
  • Pressure: 0.2% of Full Scale (FS)
  • Temperature uncertainty at calibrated range: 0.5°C

Max. Differential Pressure:

10 psi, differential

Gases Used:

  • Use dry non-condensing and clean gases
  • Air, Nitrogen, Helium, Argon, & Carbon Dioxide
  • Other Gases Available, consult ATC, Inc.

Response Time:

  • Step function: from no flow to full range – 50 ms or less
  • Sensor only, no volume

if2-m-sensors

IF2-M Sensors measures volume flow in Viscous/Slip Flow regimes

 

Volumetric flow (constant) vs. Signal
Note: 1 mm3/min= 1 micro-liter/min;
10 mm-3 /min @ 12.1 Kpa= 2×10-5 atm-cc/sec @ 20°C

 

All products ship fully calibrated. No daily calibration required.